 |
 |
|
Joachim
Huth
Max-Planck-Institut für Chemie, Cosmochemistry Department
| The LEO
1530 is a high resolution field emission scanning electron microscope
(SEM), which together with an energy dispersive x-ray analysis (EDX system from
OXFORD2) provides the ability to visualise and
to analyse surface features of material as small as 0,3 microns in diameter.
This makes SEM / EDX a perfect system for the analysis of materials, minerals,
contaminant particles and particles collected by filtration. |
Specification
| Resolution: |
1 kV / 3 nm,
20 kV
/ 1 nm |
| Magnification: |
20X to 900,000X
|
| Accelerating
Voltage: |
200 V to 30 kV |
| Probe Current: |
4 pA to 10 nA |
| Electron Gun: |
Thermal field emission
type |
| Specimen Stage: |
x=75 mm, y=75 mm, z=25
mm
(all motorized) |
| Detectors: |
In-Lens annular,
Secundary Electron (SED),
Backscattered (BSD) |
| EDX: |
Working distance 8.5
mm |
| Image
Processing: |
Pixel averaging,
frame integration,
continuous averaging |
| Image
Resolution: |
512 x 384 to 3072 x 2304
pixel |
|
|
